Low differential pressure mass flow controller - メーカー・企業と業務用製品 | イプロスものづくり

Low Differential Pressure Mass Flow Controller MC-3000S series

It is a mass flow controller that can operate at low differential pressure such as SDS.

This is a mass flow controller that can control gas flow rates even at low pressure using proprietary technology. 【Features】 ○ Capable of controlling 10 SCCM (N2) at a differential pressure of 6 Torr due to its unique low-pressure loss structure ○ Suitable for applications such as AsH3 and PH3, and can control gases from liquids without heating ○ Compatible with the general-purpose interface RS485 ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Equipped with a high-speed, high-performance piezo actuator *For other functions and details, please download the catalog.